Return to search

Process development for the fabrication of suspended membrane with nanoscale through vias on a silicon substrate /

Thesis (M.Phil.)--Hong Kong University of Science and Technology, 2009. / Includes bibliographical references (p. 75-81).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/403203226
Date January 2009
CreatorsLau, Chi Ho.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceView abstract or full-text.

Page generated in 0.0017 seconds