Fundamental understanding of the physics and modeling of boron source/drain extension evolution during CMOS device fabrication

Description

Thesis (Ph. D.)--University of Texas at Austin, 2003. / Supervisors: Sanjay K. Banerjee and Amitabh Jain. Vita. Includes bibliographical references. Available also from UMI Company.

Links & Downloads

1. http://wwwlib.umi.com/cr/utexas/fullcit?p3119544
2. http://repositories.lib.utexas.edu/bitstream/handle/2152/708/kohlip039.pdf

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Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/56208145
Date	January 2003
Creators	Kohli, Puneet, Banerjee, Sanjay, Jain, Amitabh,
Source Sets	OCLC
Language	English
Detected Language	English