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Hafnium dioxide gate dielectrics, metal gate electrodes, and phenomena occurring at their interfaces

Thesis (Ph. D.)--University of Texas at Austin, 2004. / Supervisor: John G. Ekerdt. Vita. Includes bibliographical references. Also available from UMI.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/57663399
Date January 2004
CreatorsSchaeffer, James Kenyon, Ekerdt, John G.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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