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Characterization studies of a closed-field unbalanced magnetron sputtering system

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1. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.360459

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:360459
Date	January 1997
Creators	Kelly, Peter James
Publisher	University of Salford
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation