Stress and microstructure of sputter deposited thin copper and niobium films

Description

Zugl.: Stuttgart, University, Diss., 2003.

Links & Downloads

1. http://elib.uni-stuttgart.de/opus/volltexte/2003/1413/pdf/OkoloBrando.pdf
2. http://elib.uni-stuttgart.de/opus/volltexte/2003/1413/index.html
3. http://deposit.ddb.de/cgi-bin/dokserv?idn=968307272

Tags

Metallschicht

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/76556844
Date	January 2003
Creators	Okolo, Brando Chidi.
Publisher	Stuttgart : Max-Planck-Inst. für Metallforschung,
Source Sets	OCLC
Language	English
Detected Language	English