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Optimizing inspection of high aspect ratio microstructure using a programmable optical microscope

Thesis (M.S. in M.E.)--School of Mechanical Engineering, Georgia Institute of Technology, 2004. Directed by Thomas R. Kurfess. / Includes bibliographical references (leaves 110-112).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/54951821
Date January 2003
CreatorsCeremuga, Joseph Thomas,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAvailable online, Georgia Institute of Technology, 2004:

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