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Tlakový senzor typu MEMS využívající nanokompozity / MEMS pressure sensor utilizing nanocomposites

The main goal of this work is to introduce with the basic technologies of manufacturing MEMS (Micro-electro-mechanical-systems). Further there is mentioned properties and manufacturing of CNT (Carbon nanotubes), used in manufacturing of capacitance pressure sensor.

Identiferoai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:217234
Date January 2008
CreatorsŠeda, Miroslav
ContributorsMusil, Vladislav, Ficek, Richard
PublisherVysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Source SetsCzech ETDs
LanguageCzech
Detected LanguageEnglish
Typeinfo:eu-repo/semantics/masterThesis
Rightsinfo:eu-repo/semantics/restrictedAccess

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