Many applications in microelectromechanical systems such as smart living space sensing system, microchannel system on chip and biomedical sensing system usually require instantaneously compensating or controlling the temperature of chip to acquire more linear and accurate output signal. So it is necessary to develop a micro temperature sensor or micro-hot-plate which has highly thermal isolation and low power characteristics.
This thesis aims to design and fabricate a low power micro-hot-plate and a high-sensitivity temperature sensor for portable applications. This dissertation utilized a high power E-beam evaporator to deposit the platinum thin film as the material of temperature sensing and heating. The Pt layer is patterned using the lift-off technique. In addition, the micro-hot-plate can be released from the silicon substrate as a floating thin-plate using TMAH-based anisotropic etching technology. The floating structure can improve the thermal isolation and reduce the power loss through the silicon substrate. In this study, the higher temperature sensitivity (1914 ppm/¢J) and optimized sensing linearity ( > 99.9 %) of the platinum-based temperature sensor is demonstrated. On the other hand, the heating power of the floating micro-hot-plate developed in this research is only 14 mW when it be heated to 300 ¢J and the power efficiency is very high (18.3 ¢J/mW).
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0910107-183149 |
| Date | 10 September 2007 |
| Creators | Chen, Sheng-wei |
| Contributors | Yu-Cheng Lin, Jin-Chern Chiou, I-Yu Huang, Shiang-Hwua Yu |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0910107-183149 |
| Rights | not_available, Copyright information available at source archive |
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