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Design of two-axis capacitive accelerometer using MEMS /

Thesis (M.S. in Applied Physics)--Naval Postgraduate School, Dec. 2004. / Thesis Advisor(s): Gamani Karunasiri. Includes bibliographical references (p. 41-42). Also available online.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/58725280
Date January 2004
CreatorsLee, Chun Ming.
PublisherMonterey, Calif. : Springfield, Va. : Naval Postgraduate School ; Available from National Technical Information Service,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
Source(1.19 MB)

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