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High-reflectance, sputter-deposited aluminum alloy thin films for micro-electro-mechanical systems /

Thesis (M.S.)--Rochester Institute of Technology, 2005. / Typescript. Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/62716969
Date January 2005
CreatorsBarron, Lance W.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceOnline version of thesis

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