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Wafer-level encapsulated high-performance mems tunable passives and bandpass filters

Thesis (Ph.D)--Electrical and Computer Engineering, Georgia Institute of Technology, 2009. / Committee Chair: Farrokh Ayazi; Committee Member: James D. Meindl; Committee Member: Joy Laskar; Committee Member: Mark G. Allen; Committee Member: Paul A. Kohl. Part of the SMARTech Electronic Thesis and Dissertation Collection.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/521099962
Date January 2008
CreatorsRais-Zadeh, Mina.
PublisherAtlanta, Ga. : Georgia Institute of Technology,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAvailable online, Georgia Institute of Technology:

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