Return to search

Analysis and preliminary characterization of a MEMS cantilever-type chemical sensor

Thesis (M.S.)--Worcester Polytechnic Institute. / Keywords: frequency; vibration; vibrometry; detection; resonance; micromechanical; polymer; absorption; AFM; SEM; holography; optoelectronic; silicon; hydrogen; palladium. Includes bibliographical references (p. 151-161).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/57240961
Date January 2003
CreatorsArecco, Daniel.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceLink to electronic thesis.

Page generated in 0.0016 seconds