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Design, analysis and simulation of a microcompressor driven by a vertical comb-drive actuator

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Identiferoai:union.ndltd.org:ucf.edu/oai:stars.library.ucf.edu:rtd-2860
Date01 October 2000
CreatorsHao, Zhili
PublisherSTARS
Source SetsUniversity of Central Florida
LanguageEnglish
Detected LanguageEnglish
Typetext
SourceRetrospective Theses and Dissertations

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