Mechanical properties of near-frictionless hydrogenated amorphous carbon freestanding thin films for MEMS devices

Description

Thesis(M.S.)--Auburn University, 2005. / Abstract. Includes bibliographic references.

Links & Downloads

1. http://repo.lib.auburn.edu/2005%20Fall/Thesis/ZHOU_BO_1.pdf

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Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/228445727
Date	January 2005
Creators	Zhou, Bo. Prorok, Barton Charles.
Publisher	Auburn, Ala. ,
Source Sets	OCLC
Language	English
Detected Language	English