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Design and fabrication of a novel electrostatic micromirror with high speed and large rotation angle

Thesis (M.S.)--University of Florida, 2005. / Title from title page of source document. Document formatted into pages; contains 60 pages. Includes vita. Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/436098121
Date January 2005
CreatorsChang, Won Jae.
Publisher[Gainesville, Fla.] : University of Florida,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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