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Role of carbon dioxide in gas expanded liquids for removal of photoresist and etch residue

Thesis (Ph.D)--Chemical Engineering, Georgia Institute of Technology, 2008. / Committee Chair: Hess, Dennis; Committee Member: Eckert, Charles; Committee Member: Frazier, Bruno; Committee Member: Henderson, Clifford; Committee Member: Liotta, Charles. Part of the SMARTech Electronic Thesis and Dissertation Collection.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/430050205
Date January 2007
CreatorsSong, Ingu.
PublisherAtlanta, Ga. : Georgia Institute of Technology,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAvailable online, Georgia Institute of Technology:

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