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Microfluidic control systems in deep etch optical lithography

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  1. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.391693
Tags
530.41
Additional Fields
Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:391693
Date January 1999
CreatorsPye, Nathan
PublisherDe Montfort University
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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