Development and study of nano-imprint and electron beam lithography materials for semiconductor devices

Description

Thesis (Ph. D.)--University of Texas at Austin, 2005. / Supervisor: C. Grant Willson. Vita. Includes bibliographical references.

Links & Downloads

1. http://repositories.lib.utexas.edu/bitstream/handle/2152/1952/kime85095.pdf

Tags

Semiconductors. Microlithography.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/67839758
Date	January 2005
Creators	Kim, Eui Kyoon, Willson, C. G.
Source Sets	OCLC
Language	English
Detected Language	English