Investigation of an in-situ method for determining the modulation transfer function and its applications in a microlithographic wafer stepper /

Description

Thesis (M.S.)--Rochester Institute of Technology, 1990. / Spine title: In-situ method for determining modulation transfer. Includes bibliographical references (leaves 56-60.).

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1. http://hdl.handle.net/1850/11325

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Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/24558474
Date	January 1990
Creators	Carlson, Steven D.
Source Sets	OCLC
Language	English
Detected Language	English
Source	Online version of thesis