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Laser induced desorption time of flight mass spectrometer analysis of adsorbed surface contaminants on vacuum ultraviolet lithography optic materials

Thesis (M.S.)--Florida State University, 2003. / Advisor: Dr. Susan Davis Allen, Florida State University, College of Engineering, Dept. of Electrical and Computer Engineering. Title and description from dissertation home page (viewed Apr. 12, 2004). Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/55056046
Date January 2003
CreatorsSurpaneni, Yamini. Allen, Susan D.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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