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Dynamics of hybrid MEMS sensors and switches for mass and acceleration detection

Thesis (Ph. D.)--State University of New York at Binghamton, Thomas J. Watson School of Engineering and Applied Science, Department of Mechanical Engineering, 2009. / Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/436044454
Date January 2009
CreatorsAlsaleem, Fadi M.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
TypeElectronic books. Electronic dissertations.
SourceOnline access via UMI:

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