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Design and Analysis of Wafer-Level Vacuum-Encapsulated Disk Resonator Gyroscope Using a Commercial MEMS Process

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1. http://rave.ohiolink.edu/etdc/view?acc_num=dayton1510764485530995

Identifer	oai:union.ndltd.org:OhioLink/oai:etd.ohiolink.edu:dayton1510764485530995
Date	20 December 2017
Creators	Uppalapati, Balaadithya
Publisher	University of Dayton / OhioLINK
Source Sets	Ohiolink ETDs
Language	English
Detected Language	English
Type	text
Source	http://rave.ohiolink.edu/etdc/view?acc_num=dayton1510764485530995
Rights	unrestricted, This thesis or dissertation is protected by copyright: all rights reserved. It may not be copied or redistributed beyond the terms of applicable copyright laws.