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Development of a fabrication process for a MEMS component from ultra fine grained alloys

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1. https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.561495

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:561495
Date	January 2010
Creators	Qiao, Xiao Guang
Publisher	University of Southampton
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation
Source	https://eprints.soton.ac.uk/185091/