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Atmospheric pressure chemical vapour deposition of titanium nitride from titanium tetrachloride and ammonia

No description available.
Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:242208
Date January 1996
CreatorsJohnson, Saccha Ellen
PublisherUniversity of Southampton
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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