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Study of silicon-on-insulator structures formed by low dose implantation of oxygen and nitrogen

No description available.

1. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.281765

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:281765
Date	January 1995
Creators	Wong, Jimmy Kam Yiu
Publisher	Imperial College London
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation