This thesis deals with an electron scattering in STEM microscopy on objects with dif-ferent shapes, such as cuboid, sphere and hollow capsule. Monte Carlo simulations are used for description of multiple electron scattering. Except the theoretical analysis of the electron scattering and simulation methods, the thesis contains design and realiza-tion of an algorithm simulating electron scattering in given objects. In addition, there is a design for robustness evaluation of the simulation, based on comparison between results and known signals for a given object. Reliability of the algorithm was verified by experimental measurements of the electron scattering on a carbon layer.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:242036 |
| Date | January 2016 |
| Creators | Záchej, Samuel |
| Contributors | Hrubanová, Kamila, Krzyžánek, Vladislav |
| Publisher | Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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