We use Particle-in-Cell Method¡]PIC¡^and Monte-Carlo-Collision Method¡]MCC¡^to model a plasma colliding system .By this way¡Awe can realize the behaviors and effects in the motion of plasma collision .
Our mainly discuss is that the system will produce a thin layer¡]Sheath¡^between plasma and a workpiece ¡Aand the effects of colliding phenomenon in this thin layer¡]Sheath¡^ .
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0207106-122241 |
| Date | 07 February 2006 |
| Creators | Luo, Shih-cing |
| Contributors | Peng-Sheng Wei, Tai-Fa Young, none |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0207106-122241 |
| Rights | withheld, Copyright information available at source archive |
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