Polycrystalline AlN thin films were reactively deposited onto Al layers on negatively biased glass and Si substrates at temperatures < 80 oC by coherent magnetron sputtering. The target-to-substrate distance is 17 cm. The microstructures and morphology of the films grown at different bias voltages on the substrates were investigated. Typical thickness of the deposited film is 600 nm. The films were amorphous when no bias was applied to the substrates. Diffraction peak of AlN (002) direction was observed at bias voltages of -180 and -210 V. At a bias voltage of -210 V, the (002) granular crystal with the maximum diameter of 80 nm was obtained. In addition to the AlN (002) direction, AlN (100) direction was observed when the bias voltage was increased to -240 and -270 V. The peak of (002) plane vanished at a bias voltage of -320 V. Moreover, the deposited AlN films have specular reflectance owning to the large target-to-substrate distance. The maximum roughness of the films was 47.2¡Ó5.0 nm at a bias voltage of -210 V.
The hardness and microstructure of aluminum nitride (AlN) thin films prepared by long-distance magnetron sputtering at room temperature has been investigated. The hardness and microstructure of the films were found to vary greatly with different substrate biases. At a bias voltage of ¡V210 V, the (002) polycrystalline AlN with the maximum hardness of 17.5 GPa was observed. The water droplet contact angle under this bias condition is larger than 90¢X indicating that hydrophobicity can be obtained at the film surface. In addition, hardness of (002) AlN films prepared by sputtering of AlN target at room temperature and by reactive sputtering of Al target at 400¢XC were discussed and compared with that of AlN films prepared by long-distance reactive sputtering.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0622105-130114 |
| Date | 22 June 2005 |
| Creators | Lee, Feng-Zhi |
| Contributors | Cheng-Tang Pan, Chun-Hsun Chu, Hung-Wen Chang, Daniel Yen Chu, Chien-Hsiang Chao, San-Liang Lee, Ann-Kuo Chu |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | English |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0622105-130114 |
| Rights | off_campus_withheld, Copyright information available at source archive |
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