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Inorganic x-ray mask technology for quantum-effect devices

William Chu. / Includes bibliographical references (p. 116-123). / Supported in part by the Joint Services Electronics Program. DAAL03-92-C-0001 Supported in part by the National Science Foundation. ECS 90-16437 Supported in part by the U.S. Air Force Office of Scientific Research, and the Defense Advanced Research Projects Agency. N00019-92-K-0021

Identiferoai:union.ndltd.org:MIT/oai:dspace.mit.edu:1721.1/4176
Date January 1993
ContributorsChu, William.
PublisherResearch Laboratory of Electronics, Massachusetts Institute of Technology
Source SetsM.I.T. Theses and Dissertation
LanguageEnglish
Detected LanguageEnglish
Format123 p., 9596652 bytes, application/pdf
RelationTechnical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 577.

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