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Ion beam enhanced grain growth in thin films

Harry Albert Atwater, Jr. / Bibliography: p. 213-224. / Supported in part by the National Science Foundation ECS-85-06565 Supported in part by the U.S. Air Force grnat AFOSR 85-0154C

Identiferoai:union.ndltd.org:MIT/oai:dspace.mit.edu:1721.1/4216
Date January 1987
ContributorsAtwater, Harry Albert, 1960-
PublisherMassachusetts Institute of Technology, Research Laboratory of Electronics
Source SetsM.I.T. Theses and Dissertation
LanguageEnglish
Detected LanguageEnglish
Format224 p., 8891532 bytes, application/pdf
RelationTechnical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 527.

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