The surface phenemona in polishing process induced by nano-particle was studied in this thesis. The properties of particle, rigidity and geometry, are forced. A perfect polished surface includes lower roughness and thinner damage layer. Besides a perfect surface, how we get higher rate of remove is also an important thing. The goal is to get the relation between induced surface phenomena and properities of nano-particle. The M.D. (Molecular Dynamic) simulation is uesed in this thesis. The specicaly lowered integral timestep is second for simulating the rigidity of nano-particle with saving simulation time and geting accurate in simulation results. In order to simuate the nano-particle rigidity and adhesive effects between nanoparticle and work surface, the modified potential function is used. Considering the types of nano-particle motion which are pure rolling and sliding, the different geometric shapes are used .
In the results of simulation about the rigidity of particles, the phenomena induced by rolling particles and rigidity don¡¦t have apparent correlation. For sliding particles, the lower rigidity and lower thick damage layer was. However, if the rigidity is too weak to hold the particle geometric shape, the damage layer thickness is larger. In the results of simulation about particle shapes, the sliding particle with larger front angle will indcue deeper damager layer. It¡¦s because the more workpiece atoms could move to the bottom or rear of the particles to make more damaged atoms. If the length of particle bottom be increased, the interactive behavior between particle and work surface would become more violently to make deeper damaged layer. The rolling particle with scraggy surface can cohere more atoms than the ball particle even in the lower adhesive coefficient, but induced roughness will be higher .
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0719105-095335 |
| Date | 19 July 2005 |
| Creators | Cheng, Chih-jen |
| Contributors | Tu-Chieh Huang, Jung-Shu Wu, Yaw-Terng Su, Kuang-Hua Fuh |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0719105-095335 |
| Rights | unrestricted, Copyright information available at source archive |
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