Thesis (MScEng (Electrical and Electronic Engineering))--University of Stellenbosch, 2010. / ENGLISH ABSTRACT: This report intends to show how able the Stellenbosch Electrical and Electronic
Engineering Department’s micro fabrication laboratory is to manufacture
nanomechanical switches and similar structures. Following the investigation,
an attempt will be made to produce these devices.
In attaining this goal, a literature study was performed focusing on mechanical
switching and nanotechnology. Their origins, development and current
application are investigated, as well as the requirements for developing these
devices.
Having completed the literature study, a series of current nanomechanical
switches where investigated, selecting those most likely to be manufactured at
the available facilities and having the required attributes for taking the place
of silicon transistors in low speed, hostile environments.
The most common method of manufacturing nanoswitches is simulated using
several methods of predicting device failure. This will aid in the selection of
manufacturing process guidelines, such as dimensions in the photoresist templates
and layer thickness before etching, allowing for the repeated production
of functional switches.
The two manufacturable nanomechanical switches are investigated, using
techniques and materials available at the micro fabrication laboratory to manufacture
them. Subsequently, their electrical properties will be determined and
used in simulating their failure characteristics.
In conclusion, the result are discussed along with advice and improvements
for the continued investigation and production of nanodevices at Stellenbosch
University / AFRIKAANSE OPSOMMING: Die doel met hierdie tesis is om die vermoë van die Departement Elektriese en
Elektroniese Ingenieurswese se mikro-elektronika laboratorium te ondersoek
ten opsigte van die vervaardiging van nanomeganiese skakelaars en aanverwante
komponente. Na afloop van die ondersoek sal ’n poging aangewend
word om hierdie toestelle te vervaardig.
In nastrewing van hierdie doel is ’n literatuurstudie uitgevoer wat fokus op
meganiese skakeling en nanotegnologie. Die oorsprong, ontwikkeling en huidige
aanwending van hierdie skakelaars word ondersoek, sowel as die vereistes vir
die ontwikkeling daarvan.
Na voltooiing van die literatuurstudie word ’n reeks van bestaande nanomeganiese
skakelaars ondersoek. Skakelaars word dan geïdentifiseer op grond
van hul waarskynlike vervaardigbaarheid met die beskikbare fasiliteite. Die
vereiste eienskappe vir lae spoed toepassings in omgewings waar silikon-skakelaars
nie kan werk nie, word ook in ag geneem.
Die mees algemene metode vir die vervaardiging van nanoskakelaars word
gesimuleer met behulp van verskeie tegnieke wat toestelfaling voorspel. Die
simulasies sal help in die keuse van vervaardigingsriglyne van die proses, soos
die dimensies van die fotolak template en die laagdiktes voor etsing, sodat
goeie resultate verkry kan word wanneer die skakelaars vervaardig word, met
goeie herhaalbaarheid.
Die twee gekose vervaardigbare nanomeganiese skakelaars word dan ondersoek
ten opsigte van die tegnieke en materiale wat in die mikro-elektronika
laboratorium beskikbaar is. Daarna sal die elektriese eienskappe van die skakelaars
bepaal word.
Ter afsluiting word die resultate bespreek, saam met aanbevelings vir die
voortsetting van die navorsing om nanomeganiese skakelaars by die Universiteit
van Stellenbosch te vervaardig.
| Identifer | oai:union.ndltd.org:netd.ac.za/oai:union.ndltd.org:sun/oai:scholar.sun.ac.za:10019.1/4268 |
| Date | 03 1900 |
| Creators | Schenke, Carlo |
| Contributors | Perold, W. J., University of Stellenbosch. Faculty of Engineering. Dept. of Electrical and Electronic Engineering. |
| Publisher | Stellenbosch : University of Stellenbosch |
| Source Sets | South African National ETD Portal |
| Language | English |
| Detected Language | Unknown |
| Type | Thesis |
| Format | 128 p. : ill. |
| Rights | University of Stellenbosch |
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