Towards a universal ultra-thin fluorinated diamond-like carbon coating for nanoimprint lithography imprinters /

Description

Thesis (M.S.)--Rowan University, 2009. / Typescript. Includes bibliographical references.

Links & Downloads

1. http://www.lib.rowan.edu/find/theses

Tags

Lithography Nanoscience.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/650308757
Date	January 1900
Creators	Fillman, Ryan Winfield.
Source Sets	OCLC
Language	English
Detected Language	English
Source	Full text available online