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High aspect ratio microsystem fabrication by ion track lithography /

Diss. (sammanfattning) Uppsala : Univ., 2003. / Härtill 7 uppsatser.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/186435657
Date January 2003
CreatorsLindeberg, Mikael,
PublisherUppsala : Acta Universitatis Upsaliensis : Univ.-bibl. [distributör],
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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