High aspect ratio microsystem fabrication by ion track lithography /

Description

Diss. (sammanfattning) Uppsala : Univ., 2003. / Härtill 7 uppsatser.

Links & Downloads

1. http://publications.uu.se/theses/91-554-5515-8/

Tags

Nanoteknik. Elektronoptik. Joner.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/186435657
Date	January 2003
Creators	Lindeberg, Mikael,
Publisher	Uppsala : Acta Universitatis Upsaliensis : Univ.-bibl. [distributör],
Source Sets	OCLC
Language	English
Detected Language	English