NiTi alloys with nearly equiatomic chemical composition are the most studied and the most practically utilized materials from the group of the shape memory alloys (SMA). The NiTi alloy has a thermoelastic martensitic transfor- mation (MT), which its two most important properties are based on: the shape memory and the superelasticity. Thin films of NiTi alloys with thicknesses from hundreds of nm to units of µm have a wide use mainly in microelectromechanical systems (MEMS). The doctoral thesis deals with a fabrication of thin NiTi films using a deposition on silicon substrates with two techniques - the magnetron sputtering and the pulsed-laser deposition (PLD), an investigation of their mi- crostructure using x-ray diffraction, a heat treatment of amorphous NiTi films and with a verification of MT using resistometry. Furthermore, thermomechan- ical properties of a system NiTi-polyimide (NiTi-PI), namely a dependence of a curvature radius of a NiTi-PI bilayer on temperature, are studied. 1
Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:353428 |
Date | January 2016 |
Creators | Svatuška, Michal |
Contributors | Vokoun, David, Dlouhý, Antonín, Novák, Pavel |
Source Sets | Czech ETDs |
Language | Czech |
Detected Language | English |
Type | info:eu-repo/semantics/doctoralThesis |
Rights | info:eu-repo/semantics/restrictedAccess |
Page generated in 0.8224 seconds