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Diagnostics and modeling of an inductively coupled radio frequency discharge in hydrogen

Bochum, University, Diss., 2004.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/76653007
Date January 2004
CreatorsKadetov, Victor A.
Publisher[S.l. : s.n.],
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceLF

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