NDLTD Global ETD Search
New Search
Return to search
Ionenassistierte Deposition von Siliciumschichten
Description
Universiẗat, Diss., 2001--Stuttgart.
Links & Downloads
http://elib.uni-stuttgart.de/opus/volltexte/2001/810/pdf/Dissertation_Lars_Oberbeck_Druckversion.pdf
http://deposit.d-nb.de/cgi-bin/dokserv?idn=96151938X
Tags
Additional Fields
Identifer
oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/174753088
Creators
Oberbeck, Lars.
Source Sets
OCLC
Language
German
Detected Language
German
Page generated in 0.0014 seconds