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Process development and characterization of silicon and silicon-germanium grown in a novel single-wafer LPCVD system

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Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:243179
Date January 1995
CreatorsBonar, Janet Marion
PublisherUniversity of Southampton
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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