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Fabrication of Micro-ball Lenses Array and its Optical Performance Analysis

Along with the rising and flourishing development of the modern technology and human knowledge, the demands for optical-electric products and communication systems are getting more and more. By combining the semi-conductor technology process with micro optical elements, a complete micro optical system can be integrated. The functions of a micro optical system include beam-splitting, beam-light offsetting, focusing, and switching, etc. Letting micro optical elements be integrated on a substrate, the fix and alignment problems, which are caused by the relative displacements between the elements, can be improved. Also, the production rate can be increased and cost can be reduced if the products are made by micro mold and array fabricated process. Thus, the technology of the Micro Optical Electro Mechanical System is widely applied to manufacture the products of optical-electric and communication, such as the backlight module of a LCD, projector, and optical fiber communication system, etc.
The main purpose of this study is to design and fabricate a microball-lens array, and to apply it to couple optical fibers. The proposed product is a 3D micro-ball-lens array with vertical and non-vertical focus directions and better coupling efficiency. A v-groove is fabricated by using semi-conductor technology in order to fix the micro-ball-lens array and optical fiber such that an optical fiber switch coupling system can be obtained. The packaging of the optical fiber switch coupling system is formed by UV-cure and a microcap which is fabricated by MEMS. It can provide the protection to the system. Also, the completed system can achieve the demands of the industry fields such as precise localization, cost reduction and so on.

Identiferoai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0728105-145443
Date28 July 2005
CreatorsHsieh, Chi-Chang
ContributorsChi-Hui Chien, Ing-Rong Horng, Yung-Chang Chen, Cheng-Tang Pan, Ting-Nung Shiau, Jao-Hwa Kuang, Shou-Shing Hsieh, Yii-Tay Chiou
PublisherNSYSU
Source SetsNSYSU Electronic Thesis and Dissertation Archive
LanguageEnglish
Detected LanguageEnglish
Typetext
Formatapplication/pdf
Sourcehttp://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0728105-145443
Rightsnot_available, Copyright information available at source archive

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