A Y-branch optical power splitter based on the buried waveguide and the micro-prism waveguide bends is presented. The 132 splitter consists of a beam expanding region, a conventional Y-branch region, and two micro prisms providing large angle waveguide bends of device.
The 132 splitter are fabricated by first depositing a 10-£gm-thick PECVD oxide (SiO2) on Si s ubstrates. The guiding core of the device was fabricated by etching trenches in SiO2 cladding, and filled with Benzocyclobutene (BCB) polymer. After etch-back process, the thin layer of spin on glass (SOG) is used to further planarized the surface of the device. The propagation loss of the waveguide is 0.47dB/cm at £f=1.3£gm. The normalized power transmission efficiency of the 132 splitter as large as 3.7dB was obtained. Simulation results based on beam propagation method (BPM) of the splitter is also presented.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0610102-094822 |
| Date | 10 June 2002 |
| Creators | Lee, Pei-chen |
| Contributors | none, none, A. K. Chou, none |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0610102-094822 |
| Rights | unrestricted, Copyright information available at source archive |
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