The Optical Reference Profilometer is a new coordinate measurement machine (CMM) configuration that utilizes a special optical referencing frame to provide a highly stable and highly accurate surface measurement. This new referencing frame provides several mechanical advantages that make it possible to use lower precision mechanical components while still maintaining a high measurement accuracy. The Optical Reference Profilometer also provides a reduced measurement sensitivity to thermal variations of the system. With the addition a Super-Invar metering rod network, this CMM system is essentially thermally insensitive to temperature changes on the order of 1°C. This special feature makes the Optical Reference Profilometer functional at a high measurement accuracy level in an open lab environment. For the current dissertation work, two profilometer designs were built: a prototype and a second-generation system. A discussion of both systems will be given where the advantages of the optical reference frame design will be shown, This dissertation will end with a discussion of the overall system performance and plans for future work that would increase the overall system accuracy. The optical reference profilometer has proven to be a viable testing device. It provides a high accuracy surface measurement, 100nm peak-to-valley and 15nm rms for surface slopes up to 20 degrees, with simple mechanical structures while maintaining the versatility to measure a variety of surface shapes.
| Identifer | oai:union.ndltd.org:arizona.edu/oai:arizona.openrepository.com:10150/289168 |
| Date | January 2000 |
| Creators | Clark, Stephan Richard |
| Contributors | Greivenkamp, John E. |
| Publisher | The University of Arizona. |
| Source Sets | University of Arizona |
| Language | en_US |
| Detected Language | English |
| Type | text, Dissertation-Reproduction (electronic) |
| Rights | Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author. |
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