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Photo-assisted wet (PAW) etching for laser fabrication

Thesis (Ph. D.)--Rutgers University, 2009. / "Graduate Program in Electrical and Computer Engineering." Includes bibliographical references (p. 256-264).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/501387739
Date January 2009
CreatorsYi, Eun-Hyeong,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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