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Analysis and research of an ultra-precision XY positioning stage

Abstract
This paper reports about a precision positioning XY stage utilizing flexure hinges and piezoelectric actuators. XY stage was designed with the aim of reducing the stress-concentration of flexure hinges and the low interference between two actuating axes. Utilized the expression of matrix to figure out the properties of the bellow-type flexure hinges, and proved these by mathematical software. Experiments demonstrated that the stage actuated by a stairstep driving signal with maximum displacement 1.3£gm and interference 50nm along X axis; along Y axis with maximum displacement 0.8£gm and interference 11nm. The stage actuated by a ramp signal with maximum displacement 1.2£gm and interference 45nm along X axis; along Y axis with maximum displacement 0.9£gm and interference 35nm. The finite element method (FEM) was used to analyse the stress-concentration of the stage. and the simulated results were compared with the experiments. Referred to the testing results, the target object could be moved in the aimed position accurately.

Identiferoai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0805104-130920
Date05 August 2004
CreatorsHuang, Bo-Tse
ContributorsWei-Ching Yeh, Chii-Rong Yang, Yung-Tien Liu, You-Min Huang, Yeong-Maw Hwang
PublisherNSYSU
Source SetsNSYSU Electronic Thesis and Dissertation Archive
LanguageCholon
Detected LanguageEnglish
Typetext
Formatapplication/pdf
Sourcehttp://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0805104-130920
Rightsnot_available, Copyright information available at source archive

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