This study uses the PIC (particle-in-cell) method to simulate unsteady three-dimensional behavior in argon plasma under low pressure , low density between two plates. Plasma has been widely used in materials processing, film manufacturing, nuclear fusion , light source , etc. It is therefore important to study Plasma behavior . This model ignores secondary electron emission , recombination between ions and electrons and assumes a uniform distribution of the neutrals having velocity of a Maxwellian distribution. The lower plate in subject to a biased voltage and magnetic field. The result show the effects of a biased voltage in density and velocity of the ion and electron with the low plate.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0809111-150905 |
| Date | 09 August 2011 |
| Creators | Tsai, Jie-Cheng |
| Contributors | Long-Jeng Chen, Fei-Pin Hsiao, Jiin-Yuh Jang, Peng-Sheng Wei |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0809111-150905 |
| Rights | unrestricted, Copyright information available at source archive |
Page generated in 0.0019 seconds