This thesis reports design and implementation of a MEMS based spiral channel
dielectrophoretic separator for cytometry applications. Main objective of the thesis is
to separate leukemia cells from healthy leukocytes with respect to the differences in
their dielectric properties.
A novel MEMS based dielectrophoretic separator with spiral channels and concentric
3D electrodes has been proposed. The proposed geometry decreased the footprint,
which reduces the device cost, without degrading the separation and quantization
performances. Concentric electrode geometry enables continuous electric-field
application with simple voltage supplies.
Theoretical explanation of the design has been presented and supported with finite
element method simulations. Evolution of the design has been explained in
conjunction with solutions to arising problems, chronologically. Comparisons of the
proposed system with respect to the existing systems in the literature have been
given.
The devices are fabricated using a 3-mask process utilizing suspended parylene
channel process. The experiments are realized with 1 &mu / m and 10 &mu / m polystyrene
beads. The results show that 1 &mu / m particles have an average speed of 4.57 &mu / m/s with
1.06 &mu / m/s standard deviation, and 10 &mu / m particles have an average speed of 544
&mu / m/s with 105 &mu / m/s standard deviation. The speed variation coefficient for 1 &mu / m
and 10 &mu / m beads can be calculated as 23% and 19%, respectively. The size accuracy
of the device is ± / 10%, while the resolution is 20%, that is, particles with radii
different from each other by 20% can be separated. It is worthy to note that the
experimental results almost match the simulation results.
| Identifer | oai:union.ndltd.org:METU/oai:etd.lib.metu.edu.tr:http://etd.lib.metu.edu.tr/upload/12612695/index.pdf |
| Date | 01 December 2010 |
| Creators | Yilmaz, Gurkan |
| Contributors | Kulah, Haluk |
| Publisher | METU |
| Source Sets | Middle East Technical Univ. |
| Language | English |
| Detected Language | English |
| Type | M.S. Thesis |
| Format | text/pdf |
| Rights | To liberate the content for public access |
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