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Electrical Analysis & Fabricated Investigation of Amorphous Active Layer Thin Film Transistor for Large Size Display Application

In this dissertation, the electrical characteristics of generally used hydrogenated amorphous silicon (a-Si:H) TFTs in LCD and newly risen amorphous indium-gallium-zinc oxide (a-IGZO) TFTs were studied. For modern mobile display and large-size flat panel display application, the traditional thin-film transistor-liquid crystal display (TFT-LCD) technology confronts with a lot of challenges and problems. In general, flexible displays must exhibit some bending ability; however, bending applies mechanical strain to electronic circuits and affects device characteristics. Therefore, the electrical characteristics of a-Si:H TFTs fabricated on stainless steel foil substrates with uniaxial bending were investigated at different temperatures. Experimental results showed that the on-state current and threshold voltage degraded under outward bending. This is because outward bending will induce the increase of band tail states, affecting the transport mechanism at different temperatures. In addition, for practical operation, the electrical characteristics of a-Si:H TFTs under flat and bending situations after AC/DC stress at different temperatures were studied. It was found that high temperature and mechanical bending played important roles under AC stress. The dependence between the accumulated sum of bias rising and falling time and the threshold voltage shifts under AC stress was also observed.
Because a-Si:H is a photosensitive material, the high intensity backlight illumination will degrade the performance of a-Si:H TFTs. Thus, the photo-leakage current of a-Si:H TFTs under illumination was investigated at different temperatures. Experimental results showed that a-Si:H TFTs exhibited a pool performance at lower temperatures. The indirect recombination rate and the parasitic resistance (Rp) are responsible for the different photo-leakage-current trends of a-Si:H TFTs under varied temperature operations. To investigate the photo-leakage current, the a-Si:H TFTs were exposed to ultraviolet (UV) light irradiation. It was found that the photo current of a-Si:H TFTs was reduced after UV light irradiation. The detail mechanisms on reducing/increasing photo-leakage current by UV light irradiation were discussed.
Recently, the oxide-based semiconductor TFT, especially a-IGZO TFT, is considered as one of promising candidates for active matrix flat-panel display. However, the a-IGZO TFT exists significant electrical instability issue and manufacturing problems. As a consequence, we investigated the effect of hydrogen incorporation on a-IGZO TFTs to reduce interface states between active layer and insulator. Experimental results showed that the electrical characteristics of hydrogen-incorporated a-IGZO TFTs were improved. The threshold voltage shift (£GVth) in hysteresis loop is suppressed from 4 V to 2 V due to the hydrogen-induced passivation of the interface trap states. Finally, we reported the effect of ambient environment on a-IGZO TFT instability. As a-IGZO TFTs were stored in atmosphere environment for 40 days, the transfer characteristics accompanying strange hump were observed during bias-stress. The hump phenomenon is attributed to the absorption of H2O molecule. Additionally, the sufficient electric field is also necessary to cause this anomalous transfer characteristic.

Identiferoai:union.ndltd.org:NSYSU/oai:NSYSU:etd-1019110-225810
Date19 October 2010
CreatorsTsao, Shu-Wei
ContributorsTing-Chang Chang, Tzu-Ming cheng, Wen-Yao Huang, Tsung-Ming Tsai, Mei-Ying Chang
PublisherNSYSU
Source SetsNSYSU Electronic Thesis and Dissertation Archive
LanguageEnglish
Detected LanguageEnglish
Typetext
Formatapplication/pdf
Sourcehttp://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-1019110-225810
Rightswithheld, Copyright information available at source archive

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