Characterization of deep UV photoresist properties by infrared near-field scanning optical microscopy and related methods

Description

Clausthal, Techn. University, Diss., 2003.

Links & Downloads

1. http://deposit.ddb.de/cgi-bin/dokserv?idn=971022275
2. http://bibliothek.tu-clausthal.de/OPUS/volltexte/2004/35/pdf/DISSERTATION.pdf
3. http://bibliothek.tu-clausthal.de/OPUS/volltexte/2004/35/index.html

Tags

Photoresist

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/76506448
Date	January 1900
Creators	Preusser, Jan.
Publisher	[S.l. : s.n.,
Source Sets	OCLC
Language	English
Detected Language	English
Source	LF