Anisotropic acid catalyst displacement in a chemically amplified photoresist via application of an electric field /

Description

Thesis (M.S.)--Rochester Institute of Technology, 2009. / Typescript. Includes bibliographical references (leaves 56-57).

Links & Downloads

1. http://hdl.handle.net/1850/11620

Tags

Photoresists Catalysts.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/567740694
Date	January 2009
Creators	Johnson, Ward A.
Source Sets	OCLC
Language	English
Detected Language	English
Source	Online version of thesis.