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Computational analysis of silicon nanoelectromechanical systems /

Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2008. / Source: Dissertation Abstracts International, Volume: 69-05, Section: B, page: 3237. Adviser: Narayana R. Aluru. Includes bibliographical references (leaves 123-131) Available on microfilm from Pro Quest Information and Learning.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/301265676
Date January 2008
CreatorsTang, Zhi.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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